Laser ablation method for production of surface acoustic wave sensors

Dmitry Lukyanov; Sergey Shevchenko; Alexander Kukaev; Daniil Safronov

doi:10.1117/12.2242005

21 October 2016 Laser ablation method for production of surface acoustic wave sensors

Dmitry Lukyanov, Sergey Shevchenko, Alexander Kukaev, Daniil Safronov

Proceedings Volume 9986, Unmanned/Unattended Sensors and Sensor Networks XII; 99860G (2016) https://doi.org/10.1117/12.2242005
Event: SPIE Security + Defence, 2016, Edinburgh, United Kingdom

Abstract

Nowadays surface acoustic wave (SAW) sensors are produced using a photolithography method. In case of inertial sensors it suffers several disadvantages, such as difficulty in matching topologies produced on opposite sides of the wafer, expensive in small series production, not allowing further topology correction. In this case a laser ablation method seems promising. Details of a proposed technique are described in the paper along with results of its experimental test and discussion.

Conference Presentation

Citation Download Citation

Dmitry Lukyanov, Sergey Shevchenko, Alexander Kukaev, and Daniil Safronov "Laser ablation method for production of surface acoustic wave sensors", Proc. SPIE 9986, Unmanned/Unattended Sensors and Sensor Networks XII, 99860G (21 October 2016); https://doi.org/10.1117/12.2242005

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