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13 December 2020 AGC Plasma Technology Solutions: Magnetron sputtering technology
Jeroen Schotsaert, Cameron A. Gottlieb
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Proceedings Volume AS20EX, SPIE Exhibition Product Demonstrations; AS20EX01 (2020) https://doi.org/10.1117/12.2588638
Event: Astronomical Telescopes + Instrumentation Exhibitor Forum, 2020, Online Only
Abstract
The principle of magnetron sputtering explained.
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© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Jeroen Schotsaert and Cameron A. Gottlieb "AGC Plasma Technology Solutions: Magnetron sputtering technology", Proc. SPIE AS20EX, SPIE Exhibition Product Demonstrations, AS20EX01 (13 December 2020); https://doi.org/10.1117/12.2588638
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