High-performance mid-infrared filter arrays for gas sensing

Kaylee D. Hakkel; Maurangelo Petruzzella; Martin Ebermann; Francesco Pagliano; Don M. J. van Elst; Anne van Klinken; Andrea Fiore

doi:10.1117/12.2606043

1 April 2022 High-performance mid-infrared filter arrays for gas sensing

Kaylee D. Hakkel, Maurangelo Petruzzella, Martin Ebermann, Francesco Pagliano, Don M. J. van Elst, Anne van Klinken, Andrea Fiore

Author Affiliations +

Proceedings Volume PC11997, Optical Components and Materials XIX; PC119970B (2022) https://doi.org/10.1117/12.2606043
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We have developed a static Fabry Perot based filter array operating in the mid-infrared range from ~2 to 4.5 μm, matching the absorption region of several volatile organic compounds. Each filter consists of a cavity system formed by two distributed bragg reflectors with a tuning element with varying length in between. The filters with high transmission (>80%) and controllable transmission peak width are integrated with an array of pyroelectric detectors. The robustness, easy-fabrication and the possibility to tune the optical response to a specific application make the integrated filter arrays suitable for compact sensing systems.

Conference Presentation

Citation Download Citation

Kaylee D. Hakkel, Maurangelo Petruzzella, Martin Ebermann, Francesco Pagliano, Don M. J. van Elst, Anne van Klinken, and Andrea Fiore "High-performance mid-infrared filter arrays for gas sensing", Proc. SPIE PC11997, Optical Components and Materials XIX, PC119970B (1 April 2022); https://doi.org/10.1117/12.2606043

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