THz silicon photonics: an intersubband emitter

David Stark; Muhammad Mirza; Luca Persichetti; Michele Montanari; Sergej Markmann; Mattias Beck; Thomas Grange; Stefan Birner; Michele Virgilio; Chiara Ciano; Michele Ortolani; Cedric Corley-Wiciak; Giovanni Capellini; Luciana Di Gaspare; Monica De Seta; Douglas J. Paul; Jérôme Faist; Giacomo Scalari

doi:10.1117/12.2609437

5 March 2022 THz silicon photonics: an intersubband emitter

David Stark, Muhammad Mirza, Luca Persichetti, Michele Montanari, Sergej Markmann, Mattias Beck, Thomas Grange, Stefan Birner, Michele Virgilio, Chiara Ciano, Michele Ortolani, Cedric Corley-Wiciak, Giovanni Capellini, Luciana Di Gaspare, Monica De Seta, Douglas J. Paul, Jérôme Faist, Giacomo Scalari

Author Affiliations +

Proceedings Volume PC12009, Quantum Sensing and Nano Electronics and Photonics XVIII; PC120090D (2022) https://doi.org/10.1117/12.2609437
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

A terahertz intersubband emitter based on silicon is presented. The emission originates from n-type Ge/SiGe quantum cascade structures. We designed a strain-compensated single quantum active region based on a vertical optical transition and tensile-strained Si0.15Ge0.85 barriers. The 51 quantum cascade periods (corresponding to 4.2 μm) were grown on a Si1-xGex reverse graded virtual substrate on Ge/Si(001) substrates. Deeply etched diffraction gratings were processed and the surface emitting devices were characterized at 5 K with a Fourier transform infrared spectrometer. We observed two distinct peaks at 3.4 and 4.9 THz with a line broadening of 20%. This is an important step towards the realization of an Ge/SiGe THz quantum cascade laser.

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David Stark, Muhammad Mirza, Luca Persichetti, Michele Montanari, Sergej Markmann, Mattias Beck, Thomas Grange, Stefan Birner, Michele Virgilio, Chiara Ciano, Michele Ortolani, Cedric Corley-Wiciak, Giovanni Capellini, Luciana Di Gaspare, Monica De Seta, Douglas J. Paul, Jérôme Faist, and Giacomo Scalari "THz silicon photonics: an intersubband emitter", Proc. SPIE PC12009, Quantum Sensing and Nano Electronics and Photonics XVIII, PC120090D (5 March 2022); https://doi.org/10.1117/12.2609437

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