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13 June 2022 Planar silicon nitride waveguide and silicon photonics integrated circuit for commercial optical gyroscope
Mike Horton
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Proceedings Volume PC12105, Fiber Optic Sensors and Applications XVIII; (2022) https://doi.org/10.1117/12.2617427
Event: SPIE Defense + Commercial Sensing, 2022, Orlando, Florida, United States
Abstract
Anello Photonics (Anello) is developing a new miniature Silicon Photonics Optical Gyro (SiPhOG) that can deliver a ten times or greater reduction in Size Weight and Power (SWAP-C) for high-precision rotational rate measurement and Inertial Navigation Systems (INS) as compared to state-of-the-art solutions. Currently, gyroscopes are bifurcated into two primary products and use cases: MEMS-based sensors satisfy the consumer market for commercial use cases and Fiber Optic Gyro (FOG) based sensors satisfy high-end navigation use cases. The Anello SiPhOG is manufactured using a semiconductor-based silicon photonic integrated circuit process, and therefore, Anello’s SiPhOG sensor will be lower priced while operating just as effectively as high-grade sensors. The SiPhOG consists of a planar silicon nitride waveguide direct coupled to a silicon photonic integrated circuit. The waveguide process is custom developed by Anello in a commercial fab and features extremely low-loss.
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Mike Horton "Planar silicon nitride waveguide and silicon photonics integrated circuit for commercial optical gyroscope", Proc. SPIE PC12105, Fiber Optic Sensors and Applications XVIII, (13 June 2022); https://doi.org/10.1117/12.2617427
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KEYWORDS
Integrated circuits
Silicon photonics
Gyroscopes
Integrated optics
Planar waveguides
Silicon
Waveguides
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