InGaP Geiger-mode avalanche photodiode photon counting arrays for airborne remote sensing applications

Ping Yuan

doi:10.1117/12.2618981

30 May 2022 InGaP Geiger-mode avalanche photodiode photon counting arrays for airborne remote sensing applications

Ping Yuan

Proceedings Volume PC12110, Laser Radar Technology and Applications XXVII; PC1211001 (2022) https://doi.org/10.1117/12.2618981
Event: SPIE Defense + Commercial Sensing, 2022, Orlando, Florida, United States

Abstract

Acqubit has been developing GaInP GmAPD photon counting arrays using a back-side illuminated homojunction InGaP mesa design. Both single element and 32 x 32 arrays GaInP GmAPDs have been designed, fabricated, and tested. We observed low dark current density of 0.32 uA/cm2 before breakdown and a dark count rate of ~ 10 kHz at 3.5 V overbias at room temperature for a 50-micron device. Furthermore, we obtained a quantum efficiency (QE) of about 55% at 520 nm without a bottom reflector. The combination of mesa structure and removal of the substrate greatly suppresses pixel crosstalk while maintaining a high QE and photon detection efficiency (PDE). We have built focal plane arrays using 32x32 GaInP arrays integrated with read-out integrated circuits (ROICs). Furthermore, we removed the GaAs substrate for backside illumination and demonstrated good QE. We integrated SiO2 micro lens arrays for improved optical fill factor.

Conference Presentation

Citation Download Citation

Ping Yuan "InGaP Geiger-mode avalanche photodiode photon counting arrays for airborne remote sensing applications", Proc. SPIE PC12110, Laser Radar Technology and Applications XXVII, PC1211001 (30 May 2022); https://doi.org/10.1117/12.2618981

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
PRESENTATION

WATCH
PRESENTATION SAVE TO MY LIBRARY

GET CITATION

KEYWORDS

Indium gallium phosphide

Photon counting

Airborne remote sensing

Avalanche photodiodes

Quantum efficiency

LIDAR

Readout integrated circuits

Show All Keywords

Keywords/Phrases

Search In:

Publication Years