Wafer-scale nanofabrication of functional metasurfaces

Ming Lun Tseng; Aleksandrs l. Leitis; Aurelian John-Herpin; Yuri S. Kivshar; Hatice Altug

doi:10.1117/12.2632574

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3 October 2022 Wafer-scale nanofabrication of functional metasurfaces

Ming Lun Tseng, Aleksandrs l. Leitis, Aurelian John-Herpin, Yuri S. Kivshar, Hatice Altug

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Proceedings Volume PC12197, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XX; PC121970P (2022) https://doi.org/10.1117/12.2632574
Event: SPIE Nanoscience + Engineering, 2022, San Diego, California, United States

Abstract

In this talk, we report a large-scale fabrication of Mid-IR metasurfaces by using a newly developed method. The metasurfaces were produced on transparent alumina membranes. Functionalities such as quasi-bound-state-in-the-continuum (quasi-BIC) resonances, mid-IR focusing, and polarization control were realized in different dielectric metasurfaces. Metasurfaces comprising aluminum nanoantennas were also fabricated and integrated into microfluidic devices for biosensing. The reported fabrication method is CMOS compatible and able to produce metasurfaces over whole Si wafers with high precision and uniformity. This work serves as a significant step in the direction of practical applications and commercialization of Mid-IR metasurfaces [Adv. Mater. 33, 2102232 (2021)].

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Ming Lun Tseng, Aleksandrs l. Leitis, Aurelian John-Herpin, Yuri S. Kivshar, and Hatice Altug "Wafer-scale nanofabrication of functional metasurfaces", Proc. SPIE PC12197, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XX, PC121970P (3 October 2022); https://doi.org/10.1117/12.2632574

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