Microfabrication of bio-inspired photonic crystals functionalized with metal-organic framework thin films as chemical sensors (Conference Presentation)

Giel Arnauts; Cesar Parra Cabrera; Nathalie Wauteraerts; Christian Renaux; Max Lutz Tietze; Margot Verstreken; Rob Ameloot

doi:10.1117/12.2633295

3 October 2022 Microfabrication of bio-inspired photonic crystals functionalized with metal-organic framework thin films as chemical sensors (Conference Presentation)

Giel Arnauts, Cesar Parra Cabrera, Nathalie Wauteraerts, Christian Renaux, Max Lutz Tietze, Margot Verstreken, Rob Ameloot

Author Affiliations +

Proceedings Volume PC12210, Organic and Hybrid Sensors and Bioelectronics XV; PC122100D (2022) https://doi.org/10.1117/12.2633295
Event: SPIE Organic Photonics + Electronics, 2022, San Diego, California, United States

Abstract

To meet the needs of high end gas sensing applications, new materials in suitable device designs are required that can challenge the state-of-the-art, especially concerning affinity towards target compounds within a complex background. Due to their high specific surface area and tailorable pore interiors, metal-organic frameworks (MOFs) serve as promising candidates to function as active coatings in next-generation sensors. However, studies on their integration in optoelectronic devices are rare due to the lack of suitable deposition methods. In this work, photonic crystal sensors functionalized with MOF thin films, are fabricated through a cleanroom-compatible process. The devices are capable of detecting low concentrations of volatile organic compounds, and thus, enable new avenues towards scalable fabrication and integration of miniature MOF-based gas sensor arrays.

Conference Presentation

Citation Download Citation

Giel Arnauts, Cesar Parra Cabrera, Nathalie Wauteraerts, Christian Renaux, Max Lutz Tietze, Margot Verstreken, and Rob Ameloot "Microfabrication of bio-inspired photonic crystals functionalized with metal-organic framework thin films as chemical sensors (Conference Presentation)", Proc. SPIE PC12210, Organic and Hybrid Sensors and Bioelectronics XV, PC122100D (3 October 2022); https://doi.org/10.1117/12.2633295

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