Presentation
3 October 2022 Superconducting nanowire single-photon detectors made of NbTiN and MoSi (Conference Presentation)
Author Affiliations +
Abstract
In this work, recent developments in the study of Superconducting Nanowire Single Photon Detectors (SNSPDs) are presented. This devices properties highly depends on the quality of the superconducting films from which they are fabricated. Here, we study some film properties for SNSPDs made out of NbTiN and MoSi in function of the deposition parameters. Subsequently we focus on the properties of the fabricated detector, such as efficiency, timing resolution and energy sensitivity.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lucio Zugliani, Rasmus Flaschmann, Christian Schmid, Stefan Strohauer, Fabian Wietschorke, Stefanie Grotowski, Simone Spedicato, Sven Ernst, Fabian Flassig, Matthias Althammer, Rudolf Gross, Jonathan Finley, and Kai Müller "Superconducting nanowire single-photon detectors made of NbTiN and MoSi (Conference Presentation)", Proc. SPIE PC12238, Quantum Communications and Quantum Imaging XX, PC122380B (3 October 2022); https://doi.org/10.1117/12.2633635
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KEYWORDS
Superconductors

Single photon detectors

Nanowires

Sensors

Deep reactive ion etching

Near infrared

Quantum efficiency

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