DUV mask writer addressable to 90nm nodes with a sustainability profile

Robert Eklund; Mikael Wahlsten; Mats Rosling; Martin Glimtoft; Gunnar Gustafsson; Ylva Mjöberg Wentzel; Anna-Karin Drake; Youngjin Park

doi:10.1117/12.2641791

11 November 2022 DUV mask writer addressable to 90nm nodes with a sustainability profile

Robert Eklund, Mikael Wahlsten, Mats Rosling, Martin Glimtoft, Gunnar Gustafsson, Ylva Mjöberg Wentzel, Anna-Karin Drake, Youngjin Park

Author Affiliations +

Proceedings Volume PC12293, Photomask Technology 2022; PC122930J (2022) https://doi.org/10.1117/12.2641791
Event: SPIE Photomask Technology + EUV Lithography, 2022, Monterey, California, United States

Abstract

Global semiconductor market is expected to have strong growth driven by various applications but suffering for the chip shortages. Tight supply is expected also in semiconductor photomask industry and the leading-edge photomask tend to have the most of the attention but concern increases in mature photomask supply chain coupled with aging photomask writers. Mycronic has introduced the SLX series to contribute solving existing issues design with sustainability profile. We will share the latest evaluation data from the system and share environmental impact of the SLX through LCA (Life Cycle Analysis).

Conference Presentation

Citation Download Citation

Robert Eklund, Mikael Wahlsten, Mats Rosling, Martin Glimtoft, Gunnar Gustafsson, Ylva Mjöberg Wentzel, Anna-Karin Drake, and Youngjin Park "DUV mask writer addressable to 90nm nodes with a sustainability profile", Proc. SPIE PC12293, Photomask Technology 2022, PC122930J (11 November 2022); https://doi.org/10.1117/12.2641791

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available