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2 December 2022 Scalable laser printing process for high power laser glass-engraved meta optics masks
Jae-Hyuck Yoo, Nathan J. Ray, Hoang T. Nguyen, Michael A. Johnson, Eyal Feigenbaum
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Proceedings Volume PC12300, Laser-Induced Damage in Optical Materials 2022; PC123000O (2022) https://doi.org/10.1117/12.2641106
Event: SPIE Laser Damage, 2022, Rochester, New York, United States
Abstract
We present a method for producing durable thin optics for high-power lasers, using scalable process for spatially patterned glass engraved metasurface. The process is based on forming an etch-mask using laser raster-scan of a thin metal film on a glass, followed by dry-etching and removal of the metal mask. We present fabricated structures, and characterization of their optical performance, mechanical stability, and laser damage performance.
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Jae-Hyuck Yoo, Nathan J. Ray, Hoang T. Nguyen, Michael A. Johnson, and Eyal Feigenbaum "Scalable laser printing process for high power laser glass-engraved meta optics masks", Proc. SPIE PC12300, Laser-Induced Damage in Optical Materials 2022, PC123000O (2 December 2022); https://doi.org/10.1117/12.2641106
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KEYWORDS
Photomasks
High power lasers
Laser processing
Laser optics
Metals
Optical components
Nanoparticles
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