Presentation
15 September 2022 Verification methods for curvilinear and real-curve geometries
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Abstract
This conference presentation was prepared for Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology, 2022.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kokoro Kato "Verification methods for curvilinear and real-curve geometries", Proc. SPIE PC12325, Photomask Japan 2022: XXVIII Symposium on Photomask and Next-Generation Lithography Mask Technology, PC123250D (15 September 2022); https://doi.org/10.1117/12.2656142
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