Novel surface nanostructuring by femtosecond laser with GHz burst mode

Shota Kawabata; Shi Bai; Kotaro Obata; Godai Miyaji; Koji Sugioka

doi:10.1117/12.2649440

17 March 2023 Novel surface nanostructuring by femtosecond laser with GHz burst mode

Shota Kawabata, Shi Bai, Kotaro Obata, Godai Miyaji, Koji Sugioka

Proceedings Volume PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; PC124080D (2023) https://doi.org/10.1117/12.2649440
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

In the last several years, femtosecond laser processing using GHz burst mode, which consists of the ultrashort laser pulse (intra-pulse) trains with the pulse-to-pulse interval of several hundred ps, has attracted much attention, as it can achieve higher-processing quality with enhanced processing efficiency than the conventional femtosecond laser irradiation scheme (single-pulse mode). However, most of the research using the GHz burst mode was aimed at ablation. In this study, we extend the GHz burst mode femtosecond laser processing to the formation of laser-induced periodic surface structures (LIPSS) to explore the possibility of novel nanostructuring, over the single-pulse mode.

Conference Presentation

Citation Download Citation

Shota Kawabata, Shi Bai, Kotaro Obata, Godai Miyaji, and Koji Sugioka "Novel surface nanostructuring by femtosecond laser with GHz burst mode", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080D (17 March 2023); https://doi.org/10.1117/12.2649440

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