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9 March 2023 Investigation of reconstruction stability and limitations for combined dithering-compressed-sensing processing of spectral imaging interferometric data in white-light interferometric surface profiling
Christopher Taudt, Sophie Gruner, Peter Hartmann
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Proceedings Volume PC12428, Photonic Instrumentation Engineering X; PC124280A (2023) https://doi.org/10.1117/12.2649589
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
In this work, we investigate the stability and limitations of two data processing technologies to enhance resolution and measurement range even further based on computational efforts. Therefore, the utilization of error-diffusion dithering for noise reduction and phase estimation was investigated in relation to different sample surface roughness values. It was shown that noise reduction of greater than 85% and measurement range extensions of up to 20% are achievable. Additionally, dithering approaches were combined with compressed sensing in order to achieve higher measurement speeds.
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Christopher Taudt, Sophie Gruner, and Peter Hartmann "Investigation of reconstruction stability and limitations for combined dithering-compressed-sensing processing of spectral imaging interferometric data in white-light interferometric surface profiling", Proc. SPIE PC12428, Photonic Instrumentation Engineering X, PC124280A (9 March 2023); https://doi.org/10.1117/12.2649589
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KEYWORDS
Interferometry
Imaging spectroscopy
Profiling
Compressed sensing
Denoising
Resolution enhancement technologies
Sensors
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