Optical measurements and numerical simulations of the Mueller matrix at silicon nanowire structures

Jana Grundmann; Tim Käseberg; Bernd Bodermann

doi:10.1117/12.2673770

23 August 2023 Optical measurements and numerical simulations of the Mueller matrix at silicon nanowire structures

Jana Grundmann, Tim Käseberg, Bernd Bodermann

Proceedings Volume PC12619, Modeling Aspects in Optical Metrology IX; PC1261903 (2023) https://doi.org/10.1117/12.2673770
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

Nanowire structures can be used for energy harvesting from renewable sources. These pillar structures with lateral dimensions in the nanometre range offer several advantages due to their small physical size and their large surface-to-volume ratio. The required nanodimensional characterization can be achieved efficiently by optical methods such as Mueller matrix ellipsometry. Here the measured Mueller matrices need to be analysed with numerical simulations to reconstruct the structural parameters of interest. We present the measurement method and measurement results on silicon nanowire test structures as well as the simulations on exemplary structures and a discussion of the results.

Conference Presentation

Citation Download Citation

Jana Grundmann, Tim Käseberg, and Bernd Bodermann "Optical measurements and numerical simulations of the Mueller matrix at silicon nanowire structures", Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC1261903 (23 August 2023); https://doi.org/10.1117/12.2673770

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