Broadband ultrathin absorber for microbolometer applications

Ting Shan S. Luk; Guangping Xu; Willard Ross; John Nogan; Ethan A. Scott; Sergei A. Ivanov; Oana Niculescu; Oleg Mitrofanov; Charles T. Harris

doi:10.1117/12.2674202

4 October 2023 Broadband ultrathin absorber for microbolometer applications

Ting Shan S. Luk, Guangping Xu, Willard Ross, John Nogan, Ethan A. Scott, Sergei A. Ivanov, Oana Niculescu, Oleg Mitrofanov, Charles T. Harris

Author Affiliations +

Proceedings Volume PC12647, Active Photonic Platforms (APP) 2023; PC126471L (2023) https://doi.org/10.1117/12.2674202
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

Microbolometers with ultrathin and efficient absorber can improve specific detectivity and response time. Resonance enhanced absorber increases thermal mass and hence reduces response time. However, for an ultrathin film to absorb light efficiently, the dielectric function of the film and its thickness must satisfy strict requirements. We experimentally demonstrate an average absorptance of 48% +/-2.5% in the 8–13 microns (769–1250 cm-1) spectral range for 10nm thick titanium nitride (TiN) supported by 100nm thick SiN suspended membrane, a value bordering on the fundamental absorptance limit of 50%.

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Citation Download Citation

Ting Shan S. Luk, Guangping Xu, Willard Ross, John Nogan, Ethan A. Scott, Sergei A. Ivanov, Oana Niculescu, Oleg Mitrofanov, and Charles T. Harris "Broadband ultrathin absorber for microbolometer applications", Proc. SPIE PC12647, Active Photonic Platforms (APP) 2023, PC126471L (4 October 2023); https://doi.org/10.1117/12.2674202

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