Functional surface treatment process and primers for extremely enhancing EUVL performance

Taiki Saijo; Yuki Furukawa; Shuhei Shigaki; Satoshi Takeda; Wataru Shibayama; Makoto Nakajima; Rikimaru Sakamoto; Kodai Kato

doi:10.1117/12.2687489

22 November 2023 Functional surface treatment process and primers for extremely enhancing EUVL performance

Taiki Saijo, Yuki Furukawa, Shuhei Shigaki, Satoshi Takeda, Wataru Shibayama, Makoto Nakajima, Rikimaru Sakamoto, Kodai Kato

Author Affiliations +

Proceedings Volume PC12750, International Conference on Extreme Ultraviolet Lithography 2023; PC127500T (2023) https://doi.org/10.1117/12.2687489
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Conference Poster

Abstract

In order to achieve good EUVL performance and pattern etch transfer, we propose functional surface treatment process and primers (FSTP). FSTP is almost single molecular type ultra thin primer (~1nm) covalently bonding to bottom HM not to bother etch transfer. Moreover, FSTP has high universality to EUV PR CAR and MOR to achieve high patterning performance. FSTP can improve CD window and sensitivity with controlling surface unit. Therefore FSTP has big advantage in EUVL process and pattern etch transfer for next generation High NA EUV process.

Citation Download Citation

Taiki Saijo, Yuki Furukawa, Shuhei Shigaki, Satoshi Takeda, Wataru Shibayama, Makoto Nakajima, Rikimaru Sakamoto, and Kodai Kato "Functional surface treatment process and primers for extremely enhancing EUVL performance", Proc. SPIE PC12750, International Conference on Extreme Ultraviolet Lithography 2023, PC127500T (22 November 2023); https://doi.org/10.1117/12.2687489

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available