Effect of ring-shaped beam on microparticle fabrication and laser welding

Daisuke Nakamura; Kazutaka Horinouchi; Masahiro Koba; Ippei Watanabe; Toshifumi Kikuchi; Keita Katayama; Mitsuhiro Higashihata; Hiroshi Ikenoue

doi:10.1117/12.3009651

13 March 2024 Effect of ring-shaped beam on microparticle fabrication and laser welding

Daisuke Nakamura, Kazutaka Horinouchi, Masahiro Koba, Ippei Watanabe, Toshifumi Kikuchi, Keita Katayama, Mitsuhiro Higashihata, Hiroshi Ikenoue

Author Affiliations +

Proceedings Volume PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; PC128720I (2024) https://doi.org/10.1117/12.3009651
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

In laser processing, the intensity distribution of the laser beam affects the crater formation and the distribution of ablated particles ejection. In this study, we demonstrated the ejection control of semiconductor microdroplets such as the droplet size and ejection direction by irradiation of the target substrate using a ring-shaped pulsed laser. In addition, we demonstrated the suppression of spatter generation in laser welding of metals with support from the ring-shaped beam.

Conference Presentation

Citation Download Citation

Daisuke Nakamura, Kazutaka Horinouchi, Masahiro Koba, Ippei Watanabe, Toshifumi Kikuchi, Keita Katayama, Mitsuhiro Higashihata, and Hiroshi Ikenoue "Effect of ring-shaped beam on microparticle fabrication and laser welding", Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC128720I (13 March 2024); https://doi.org/10.1117/12.3009651

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