Sputter-deposited aluminium oxide as a waveguide platform for UV photonics

Dawson B. Bonneville; Ward A. P. M. Hendriks; Soheila Mardani; Nadia Chahir; Bjorn Jongebloed; Meindert Dijkstra; Sonia M. García-Blanco

doi:10.1117/12.3004840

13 March 2024 Sputter-deposited aluminium oxide as a waveguide platform for UV photonics

Dawson B. Bonneville, Ward A. P. M. Hendriks, Soheila Mardani, Nadia Chahir, Bjorn Jongebloed, Meindert Dijkstra, Sonia M. García-Blanco

Author Affiliations +

Proceedings Volume PC12889, Integrated Optics: Devices, Materials, and Technologies XXVIII; PC1288905 (2024) https://doi.org/10.1117/12.3004840
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

To overcome the increased absorption of commercially available waveguide platforms for UV wavelengths, Al2O3 has been suggested due to its low losses below 450 nm. In this work, we demonstrate Al2O3 waveguides fabricated via reactive sputtering, electron beam lithography and dry etching with losses as low as 2.3 dB/cm at 369 nm. A variety of building blocks required for typical photonic devices are realized using the process which shows promise as a waveguide platform for applications that require UV wavelengths.

Conference Presentation

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Dawson B. Bonneville, Ward A. P. M. Hendriks, Soheila Mardani, Nadia Chahir, Bjorn Jongebloed, Meindert Dijkstra, and Sonia M. García-Blanco "Sputter-deposited aluminium oxide as a waveguide platform for UV photonics", Proc. SPIE PC12889, Integrated Optics: Devices, Materials, and Technologies XXVIII, PC1288905 (13 March 2024); https://doi.org/10.1117/12.3004840

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