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A liquid-assisted, laser machining process is described for high-aspect ratio micro-holes (<200-um diameter), which are produced in a variety of glass substrates with precise geometry control. Such features are difficult or impossible to fabricate using alternative approaches.
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Alexander M. Streltsov, David Lance, "Liquid-assisted laser micromachining of glasses," Proc. SPIE PC12939, High-Power Laser Ablation VIII, PC129391G (11 April 2024); https://doi.org/10.1117/12.3009899