Si metasurfaces for DUV plasmonics and biomolecular spectroscopy

Ming Lun Tseng; Bo Ray Lee; Pei Ying Ho; Mao Feng Jiang; Kuan-Heng Chen; Jia Hua Lee; Yu Chieh Peng; Po Hsiang Hsu; Der-Hsien Lien; Tzu-En Lin; Ray-Hua Horng; Yuri S. Kivshar

doi:10.1117/12.3028035

3 October 2024 Si metasurfaces for DUV plasmonics and biomolecular spectroscopy

Ming Lun Tseng, Bo Ray Lee, Pei Ying Ho, Mao Feng Jiang, Kuan-Heng Chen, Jia Hua Lee, Yu Chieh Peng, Po Hsiang Hsu, Der-Hsien Lien, Tzu-En Lin, Ray-Hua Horng, Yuri S. Kivshar

Author Affiliations +

Proceedings Volume PC13111, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXII; PC1311110 (2024) https://doi.org/10.1117/12.3028035
Event: Nanoscience + Engineering, 2024, San Diego, California, United States

Abstract

We showcase plasmonic metasurfaces employing silicon (Si) nanostructures tailored for deep ultraviolet (DUV) spectroscopy. Si exhibits plasmonic resonance owing to the photon-doping effect originating from interband transitions in the DUV range. Through careful design adjustments, our metasurface achieves strong field enhancement at ~260nm. We investigate potential applications of the reported Si void metasurfaces for surface-enhanced spectroscopy by leveraging the unique properties of our Si metasurface. This study expands the range of materials employed in DUV nanophotonics, unlocking opportunities across diverse fields such as biomedical analysis and nonlinear optics.

Conference Presentation

Citation Download Citation

Ming Lun Tseng, Bo Ray Lee, Pei Ying Ho, Mao Feng Jiang, Kuan-Heng Chen, Jia Hua Lee, Yu Chieh Peng, Po Hsiang Hsu, Der-Hsien Lien, Tzu-En Lin, Ray-Hua Horng, and Yuri S. Kivshar "Si metasurfaces for DUV plasmonics and biomolecular spectroscopy", Proc. SPIE PC13111, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXII, PC1311110 (3 October 2024); https://doi.org/10.1117/12.3028035

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