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Bimorph and MEMS Mirrors
Book: Field Guide to Adaptive Optics
Author(s): Robert K. Tyson, Benjamin West Frazier
Published: 2004
https://doi.org/10.1117/3.549261.p43
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Abstract
This excerpt gives a succinct explanation of Bimorph and MEMS Mirrors in Adaptive Optics.
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KEYWORDS
Mirrors
Microelectromechanical systems
Actuators
Adaptive optics
Deformable mirrors
Electrodes
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