GDSII Mask Layouts

Ebook Topic:
GDSII Mask Layouts

Book: Field Guide to Digital Micro-Optics

Author(s): Bernard C. Kress

Published: 2014

https://doi.org/10.1117/3.1002609.ch133

Abstract

This excerpt gives a succinct explanation of GDSII mask layouts.
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KEYWORDS

Photomasks

Fabrication

Micro optics

Microelectronics

Optical lithography

Optical signal processing

Raster graphics

Keywords/Phrases