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Greyscale Lithography (HEBS)
Book: Field Guide to Digital Micro-Optics
Author(s): Bernard C. Kress
Published: 2014
https://doi.org/10.1117/3.1002609.ch141
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Abstract
This excerpt gives a succinct explanation of greyscale lithography (HEBS).
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KEYWORDS
Analog electronics
Glasses
Grayscale lithography
Diffusion
Micro optics
Absorption
Optical fabrication
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