Access to SPIE eBooks is limited to subscribing institutions. Access is not available as part of an individual subscription. However, books can be purchased on SPIE.Org
Abstract
This section contains the bibliography, index, and author biography.

Bibliography

1 

ANSI/NCSL Z540.2, U.S. Guide to Expression of Uncertainty in Measurement, R2007 (1997).Google Scholar

2 

Badami, V. G., “Investigation and Compensation of Periodic Nonlinearities in Heterodyne Interferometry,” Ph.D. Thesis, University of North Carolina at Charlotte (1999).Google Scholar

3 

Badami, V. G., “Uncertainty in displacement measuring interferometry (DMI),” American Society for Precision Engineering Tutorial, San Diego (2012).Google Scholar

4 

Badami, V. G. and de Groot, P. J., “Displacement Measuring Interferometry,” in Handbook of Optical Dimensional Metrology, Harding, K., Ed., CRC Press, Boca Raton, FL (2013).Google Scholar

5 

Badami, V. G. and Patterson, S. R., “A frequency domain method for the measurement of nonlinearity in heterodyne interferometry,” Precision Engineering 24, 41–49 (2000).Google Scholar

6 

Baer, T., Kowalski, F. V., and Hall, J. L., “Frequency stabilization of a 0.633-m He-Ne longitudinal Zeeman laser,” Applied Optics 19, 3173–3177 (1980).Google Scholar

7 

Balhorn, R., Kunzmann, H., and Lebowsky, F., “Frequency stabilization of internal-mirror helium-neon lasers,” Applied Optics 11, 742–744 (1972).Google Scholar

8 

Birch, K. P. and Downs, M. J., “Correction to the updated Edlén equation for the refractive index of air,” Metrologia 31, 315–316 (1994).Google Scholar

9 

Birch, K. P. and Downs, M. J., “An updated Edlén equation for the refractive index of air,” Metrologia 30, 155–162 (1993).Google Scholar

10 

Bobroff, N., “Recent advances in displacement measuring interferometry,” Measurement Science and Technology 4, 907–926 (1993).Google Scholar

11 

Bryan, J., “The Abbé principle revisited: an updated interpretation,” Precision Engineering 1, 129–132 (1979).Google Scholar

12 

Ciddor, P. E., “Refractive index of air: new equations for the visible and near infrared,” Applied Optics 35, 1566–1573 (1996).Google Scholar

13 

De Freitas, J. M. and Player M. A., “Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry,” Measurement Science and Technology 4, 1173–1176 (1993).Google Scholar

14 

De Freitas, J. M. and Player, M. A., “Polarization effects in heterodyne interferometry,” Journal of Modern Optics 42, 1875–1899 (1995).Google Scholar

15 

Demarest, F. C., “High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics,” Measurement Science and Technology 9, 1024–1030 (1998).Google Scholar

16 

Edlén, B., “The refractive index of air,” Metrologia 2, 71–80 (1996).Google Scholar

17 

Ellis, J. D., “Optical Metrology Techniques for Dimensional Stability Measurements,” Ph.D. Thesis, Delft University of Technology, Netherlands, 2010.Google Scholar

18 

Estler, W. T., “High-accuracy displacement interferometry in air,” Applied Optics 24, 808–815 (1985).Google Scholar

19 

Evans, C., Precision Engineering: An Evolutionary View Cranfield Press, Bedfordshire, UK (1989).Google Scholar

20 

Evans, C., Holmes, M., Demarest, F., Newton, D., and Stein, A., “Metrology and calibration of a long travel stage,” CIRP Annals - Manufacturing Technology 54, 495–498 (2005).Google Scholar

21 

Gerrard, A., and Burch, J. M., Introduction to Matrix Methods in Optics, Dover, New York (1975).Google Scholar

22 

Haitjema, H., “Achieving traceability and sub-nanometer uncertainty using interferometric techniques,” Measurement Science and Technology 19, 084002 (2008).Google Scholar

23 

Harding, K., Ed., Handbook of Optical Dimensional Metrology, CRC Press, Boca Raton, FL (2013).Google Scholar

24 

Haycocks, J. and Jackson, K., “Traceable calibration of transfer standard for scanning probe microscopy,” Precision Engineering 29, 168–175 (2005).Google Scholar

25 

Hecht, E., Optics, Addison-Wesley, Boston (2002).Google Scholar

26 

Holmes, M. L., “Analysis and Design of a Long Range Scanning Stage,” Ph.D. Thesis, University of North Carolina at Charlotte (1998).Google Scholar

27 

Horowitz, P. and Hill, W., The Art of Electronics, Cambridge University Press, Cambridge, UK (1989).Google Scholar

28 

Heydamenn, P. L. M., “Determination and correction of quadrature fringe measurement errors in interferometers,” Applied Optics 20, 3382–3384 (1981).Google Scholar

29 

ISO/IEC Guide 99:2007, International Vocabulary Metrology – Basic and General Concepts and Associated Terms (2007).Google Scholar

30 

JCGM 100:2008, Evaluation of Measurement Data – Guide to the Expression of Uncertainty in Measurement (2008).Google Scholar

31 

Jones, R. C., “A new calculus for the treatment of optical systems: Part I – Description and discussion of the calculus,” Journal of the Optical Society of America 31, 488–493 (1941).Google Scholar

32 

Jones, R. C., “A new calculus for the treatment of optical systems: Part II – Proof of three general equivalence theorems,” Journal of the Optical Society of America 31, 493–495 (1941).Google Scholar

33 

Leach, R., Haycocks, J., Jackson, K., Lewis, A., Oldfield, S., and Yacoot, A., “Advances in traceable nanometrology at the National Physical Laboratory,” Nanotechnology 20, R1–R6 (2001).Google Scholar

34 

Leach, R. K., Fundamental Principles of Engineering Nanometrology, Elsevier, London (2010).Google Scholar

35 

Michelson, A. A., “The relative motion of the Earth and ether,” American Journal of Science s4-3, 475–478 (1897).Google Scholar

36 

Morris, R. H., Ferguson, J. B., and Warniak, J. S., “Frequency stabilization of internal mirror He-Ne lasers in a transverse magnetic field,” Applied Optics 14, 2808–2808 (1975).Google Scholar

37 

Pedrotti, F. L. and Pedrotti, L. S., Introduction to Optics, Prentice Hall, Upper Saddle River, NJ (1993).Google Scholar

38 

Quenelle, R. C., “Nonlinearity in interferometer measurements,” Hewlett Packard Journal 34, 10 (1983).Google Scholar

39 

Quinn, T. J., “Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards,” Metrologia 30, 103–541 (2003).Google Scholar

40 

Schmitz, T. L., Evans, C. J., Davies, A., and Estler, W. T., “Displacement uncertainty in interferometric radius measurements,” CIRP Annals-Manufacturing Technology 51, 451–454 (2002).Google Scholar

41 

Shaddock, D., Ware, B., Halverson, P. G., Spero, R. E., and Klipstein, B., “Overview of the LISA phasemeter,” AIP Conf. Proc. 873, 654–660 (2006).Google Scholar

42 

Sommargren, G., “A new laser measurement system for precision metrology,” Precision Engineering 9, 179–184 (1987).Google Scholar

43 

Stone, J., Phillips, S. D., and Mandolfo, G. A., “Corrections for wavelength variations in precision interferometric displacement measurements” Journal of Research of the National Institute of Standards and Technology 101, 671–674 (1996).Google Scholar

44 

Wu, C., Lawall, J., and Deslattes, R. D., “Heterodyne interferometer with subatomic periodic nonlinearity,” Applied Optics 38, 4089–4094 (1999).Google Scholar

45 

Zygo Corp., “A primer on displacement measuring interferometers,” Zygo Corp. Technical Document (1999).Google Scholar

bio1.jpg Jonathan D. Ellis is currently an Assistant Professor at the University of Rochester with a joint appointment in the Department of Mechanical Engineering and the Institute of Optics. He obtained his doctorate from the Delft University of Technology in the Netherlands, and M.S. and B.S. degrees from the University of North Carolina at Charlotte, all in mechanical engineering. He actively participates in SPIE, the Optical Society of America (OSA), and the American Society for Precision Engineering (ASPE). He currently serves as Director-at-Large and Treasurer for ASPE.

Professor Ellis’ research interests are in precision engineering, interferometry, optical metrology, instrumentation for primary standards level metrology, freeform optics fabrication and metrology, and precision scanning systems.

TOPIC
12 PAGES

SHARE
Back to Top