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Phase-Shifting Interference Microscope
Book: Field Guide to Interferometric Optical Testing
Author(s): Eric P. Goodwin, James C. Wyant
Published: 2006
https://doi.org/10.1117/3.702897.p49
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Abstract
This excerpt gives a succinct explanation of the Phase-Shifting Interference Microscope.
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KEYWORDS
Microscopes
Phase shifts
Objectives
Light sources
3D microstructuring
Interferometers
Mirrors
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