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Bottom Antireflective Coatings (BARC)
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p38
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Abstract
This excerpt gives a succinct explanation of Bottom Antireflective Coatings (BARC).
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KEYWORDS
Bottom antireflective coatings
Reflectivity
Metals
Oxides
Optical lithography
Photoresist processing
Reflection
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