NILS: The Normalized Image Log-Slope

Ebook Topic:
NILS: The Normalized Image Log-Slope

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p53

Abstract

This excerpt gives a succinct explanation of NILS: The Normalized Image Log-Slope.
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Cited by 3 scholarly publications.

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KEYWORDS

Nanoimprint lithography

Lithography

Photoresist materials

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