NILS: The Log-Slope Defocus Curve

Ebook Topic:
NILS: The Log-Slope Defocus Curve

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p54

Abstract

This excerpt gives a succinct explanation of NILS: The Log-Slope Defocus Curve.
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Cited by 2 scholarly publications.

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KEYWORDS

Nanoimprint lithography

Image quality

Coherence (optics)

Optical lithography

Quality measurement

Keywords/Phrases