Aberrations: The Zernike Polynomial

Ebook Topic:
Aberrations: The Zernike Polynomial

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p21

Abstract

This excerpt gives a succinct explanation of Aberrations: The Zernike Polynomial.
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KEYWORDS

Zernike polynomials

Monochromatic aberrations

Image acquisition

Interferometry

Lens design

Lithography

Spherical lenses

Keywords/Phrases