Top Antireflective Coatings (TARC)

Ebook Topic:
Top Antireflective Coatings (TARC)

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p37

Abstract

This excerpt gives a succinct explanation of Top Antireflective Coatings (TARC).
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KEYWORDS

Antireflective coatings

Refractive index

Photoresist materials

Refraction

Absorption

Chemically amplified resists

Reflectivity

Keywords/Phrases