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Rayleigh Criteria: Resolution
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p74
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Abstract
This excerpt gives a succinct explanation of Rayleigh Criteria: Resolution.
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KEYWORDS
Diffraction
Image resolution
Spatial frequencies
Lithographic illumination
Lithography
Optical lithography
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