Optical Proximity Effects

Ebook Topic:
Optical Proximity Effects

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p81

Abstract

This excerpt gives a succinct explanation of Optical Proximity Effects.
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Cited by 2 scholarly publications.

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KEYWORDS

Cadmium sulfide

Diffraction

Lithography

Photomasks

Keywords/Phrases