Chemically Amplified Resist Kinetics

Ebook Topic:
Chemically Amplified Resist Kinetics

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p45

Abstract

This excerpt gives a succinct explanation of Chemically Amplified Resist Kinetics.
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KEYWORDS

Chemically amplified resists

Amplifiers

Chemical reactions

Chemistry

Photoresist materials

Keywords/Phrases