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Chemically Amplified Resists
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p40
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Abstract
This excerpt gives a succinct explanation of Chemically Amplified Resists.
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KEYWORDS
Chemically amplified resists
Polymers
Chemical reactions
Molecules
Optical lithography
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