Immersion Lithography: Resolution

Ebook Topic:
Immersion Lithography: Resolution

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p31

Abstract

This excerpt gives a succinct explanation of Immersion Lithography: Resolution.
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KEYWORDS

Immersion lithography

Refractive index

Lens design

Photoresist materials

Water

Image acquisition

Image resolution

Keywords/Phrases