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Metrology: Critical Dimension
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p67
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This excerpt gives a succinct explanation of Metrology: Critical Dimension.
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KEYWORDS
Metrology
Scanning electron microscopy
Image analysis
Critical dimension metrology
Electron microscopes
Lithography
Optical microscopes
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