Post-Apply Bake Effects

Ebook Topic:
Post-Apply Bake Effects

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p48

Abstract

This excerpt gives a succinct explanation of Post-Apply Bake Effects.
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KEYWORDS

Chemically amplified resists

Absorption

Diffusion

Lithography

Optical lithography

Photoresist materials

Keywords/Phrases