Chapter 14:
Metrology
Editor(s): Rudiger Hentschel; Bernhard Braunecker; Hans J. Tiziani
Published: 2008
DOI: 10.1117/3.741689.ch14
Abstract
Metrology comprises a pointwise sampling method and apparatus to determine the surface shape of an object. When applied to a plano, spherical, or aspherical surface of an optical element, suitable sensors must be used to avoid damaging. Unlike surface-covering interferometric metrology, tactile profile measuring does not need any null systems or compensators. Coordinates of sample points are referenced against an intrinsic coordinate system, which is supplied by the machine after a calibration process.
Online access to SPIE eBooks is limited to subscribing institutions.
CHAPTER 14
35 PAGES


SHARE
KEYWORDS
Metrology

Calibration

Interferometry

Optical components

Plano

Sensors

Spherical lenses

Back to Top