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Chapter 2:
Technical Issues in Processing of CVD ZnS
In order to appreciate the complexities associated with chemical vapor deposition of ZnS and the subsequent heat treatment of the material, one must first examine the characteristics and reactions of the main components of the system (Zn, S, H2S, and Ar). Trace components in the gas system (e.g., H2O, H2, and O2) that provide alternative reaction paths must be considered as well.
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