Reference Data for the EUV Spectral Region

Gullikson, Eric M., Lawrence Berkeley National Lab.; Attwood, David T., Univ. of California, Berkeley

doi:10.1117/3.2305675.ap1

Book: EUV Lithography, Second Edition

Editor(s): Vivek Bakshi

Author(s): Eric Gullikson, David Attwood

Published: 2018

https://doi.org/10.1117/3.2305675.ap1

Author Affiliations +

Abstract

Basic equations and data for the interaction of EUV radiation with materials is presented. The complex refractive index and penetration of EUV radiation into materials is presented in terms of the real and imaginary parts of the atomic scattering factors for various atoms of common interest. These scattering factors are presented graphically as a function of photon energy, with sample tabulated values. Full access for all elements, and sample calculation routines for compound materials, are referred to the CXRO website. Basic physical constants from the NIST website are also given. Tabulations of electron binding energies and characteristically emitted photon energies are presented in tables for all natural elements.