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EUV Sources for Lithography
Editor(s): Vivek Bakshi
Published: 2006
PDF ISBN: 9780819480712 | Print ISBN: 9780819496256
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CHAPTER 1.
Bakshi, Vivek
CHAPTER 2.
Ota, Kazuya , Watanabe, Yutaka , Banine, Vadim , Franken, Hans
CHAPTER 3.
Gillaspy, John D.
CHAPTER 4.
Tolstikhina, Inga Yu. , Churilov, S. S. , Ryabtsev, A. N. , Koshelev, K. N.
CHAPTER 5.
O'Sullivan, Gerry , Cummings, Anthony , Dunne, Padraig , Hayden, Patrick , McKinney, Luke , Murphy, Nicola , White, John
CHAPTER 6.
Koshelev, K. N. , Kunze, Hans-Joachim , Gayazov, R. , Gomozov, V. , Ivanov, V. V. , Koloshnikov, Vsevolod , Korop, E. D. , Krivtsun, Vladimir , Sidelnikov, Yu. V. , Yakushev, Oleg , Zukakishvili, G. G.
CHAPTER 7.
Lebert, Rainer , Krücken, Thomas , Kunze, Hans-Joachim
CHAPTER 8.
Zakharov, Sergey V. , Novikov, Vladimir G. , Choi, Peter
CHAPTER 9.
Hassanein, Ahmed , Morozov, V. , Sizyuk, Valeryi , Tolkach, Vladimir , Rice, B.
CHAPTER 10.
Al-Rabban, Moza , Richardson, Martin , Scott, Howard , Gilleron, Franck , Poirier, Michel , Blenski, Thomas
CHAPTER 11.
Nishihara, Katsunobu , Sasaki, Akira , Sunahara, Atsushi , Nishikawa, Takeshi
CHAPTER 12.
Fomenkov, Igor V. , Partlo, William N. , Böwering, Norbert R. , Khodykin, Oleg V. , Rettig, Curtis L. , Ness, Richard M. , Hoffman, Jerzy R. , Oliver, Ian R. , Melnychuk, Stephan T.
CHAPTER 13.
Pankert, Joseph , Bergmann, Klaus , Wester, Rolf , Klein, Jürgen , Neff, Willi , Rosier, Oliver , Seiwert, Stefan , Smith, Christopher , Probst, Sven , Vaudrevange, Dominik , Siemons, Guido , Apetz, Rolf , Jonkers, Jeroen , Loeken, Michael , Derra, Günther , Krücken, Thomas , Zink, Peter
CHAPTER 14.
Stamm, Uwe , Schriever, Guido , Kleinschmidt, Jürgen
CHAPTER 15.
McGeoch, Malcolm
CHAPTER 16.
Borisov, Vladimir M. , Demin, Andrey I. , Eltsov, Alexander V. , Ivanov, Alexander S. , Kiryukhin, Yuriy B. , Khristoforov, Oleg B. , Mishchenko, Valentin A. , Prokofiev, Alexander V. , Vinokhodov, Alexander Yu. , Vodchits, Vladimir A.
CHAPTER 17.
Teramoto, Yusuke , Sato, Hiroto , Yoshioka, Masaki
CHAPTER 18.
Andrei´c, Željko , Ellwi, Samir , Kunze, Hans-Joachim
CHAPTER 19.
Stamm, Uwe , Gäbel, Kai
CHAPTER 20.
Ellwi, Samir , Comley, Andrew J. , Brownell, Michael
CHAPTER 21.
Schmidt, Martin , Barthod, Benoit , Ceccotti, Tibério , Cheymol, Guy , Hergott, Jean-François , Sublemontier, Olivier , Thro, Pierre-Yves , Cormont, Philippe , Skrzypczak, Jacky , Auguste, Thierry
CHAPTER 22.
Endo, Akira
CHAPTER 23.
Hansson, Björn A.M. , Hertz, Hans M.
CHAPTER 24.
Goldsmith, John E.M. , Kubiak, Glenn D. , Ballard, William P.
CHAPTER 25.
Moyer, Richard , Shields, Harry , Fornaca, Steven , St. Pierre, Randall , Martos, Armando , Zamel, James , Martos, Fernando , Ponti, Samuel , McGregor, R. D. , Michaelian, Mark , Hartlove, Jeffrey , McNaught, Stuart , Iwaki, Lawrence , Orsini, Rocco , Petach, Michael , Thomas, Mark , Villarreal, Armando , Bakshi, Vivek
CHAPTER 26.
Richardson, Martin , Koay, Chiew-Seng , Takenoshita, Kazutoshi , Keyser, Christian , George, Simi , Al-Rabban, Moza , Bakshi, Vivek
CHAPTER 27.
Bijkerk, Fred , van der Westen, Santi Alonso , Bruineman, Caspar , Huiting, Robert , de Bruijn, René , Stuik, Remko
CHAPTER 28.
Benck, Eric C.
CHAPTER 29.
Grantham, Steve , Tarrio, Charles , Vest, Robert , Lucatorto, Thomas
CHAPTER 30.
Scholze, Frank , Ulm, Gerhard
CHAPTER 31.
Egbert, André , Chichkov, Boris
CHAPTER 32.
Wood, Obert R. , MacDowell, Alastair
CHAPTER 33.
Marczuk, Piotr , Egle, Wilhelm
CHAPTER 34.
Derra, Günther , Singer, Wolfgang
CHAPTER 35.
Hassanein, Ahmed , Allain, Jean-Paul , Burtseva, Tatiana , Insepov, Zeke , Brooks, J. N. , Konkashbaev, Isak , Morozov, V. , Sizyuk, Valeryi , Tolkach, Vladimir , Sizyuk, T. , Rice, B. , Safronov, V. , Bakshi, Vivek
CHAPTER 36.
Ruzic, David N.
CHAPTER 37.
Klebanoff, Leonard E. , Anderson, Richard J. , Buchenauer, Dean A. , Fornaciari, Neal R. , Komori, Hiroshi
CHAPTER 38.
Pomeroy, Joshua M. , Ratliff, Laura P. , Gillaspy, John D. , Bajt, Saša
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