Access to eBooks is limited to institutions that have purchased or currently subscribe to the SPIE eBooks program. eBooks are not available via an individual subscription. SPIE books (print and digital) may be purchased individually on SPIE.Org.

Contact your librarian to recommend SPIE eBooks for your organization.
Microelectromechanical systems (MEMS) based on integrated circuit (IC) compatible micromachining have advantages denoted by three “M’s.” Miniaturization is the most popular but multiplicity, which means the batch fabrication capability of many complicated elements, and microelectronics to control motion or to add different functions such as the optical function, are equally important. This chapter deals with the application of micromachine technologies to micro-optical devices. A basic concept making the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems are reviewed.
Online access to SPIE eBooks is limited to subscribing institutions.

Back to Top