Microelectromechanical systems (MEMS) based on integrated circuit (IC) compatible micromachining have advantages denoted by three “M’s.” Miniaturization is the most popular but multiplicity, which means the batch fabrication capability of many complicated elements, and microelectronics to control motion or to add different functions such as the optical function, are equally important. This chapter deals with the application of micromachine technologies to micro-optical devices. A basic concept making the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems are reviewed.
Online access to SPIE eBooks is limited to subscribing institutions.