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Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
Published: 1997
PDF ISBN: 9781510607972 | Print ISBN: 9780819423795
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CHAPTER 1.
McWhorter, Paul J. , Frazier, A. Bruno, Georgia Institute of Technology , Rai-Choudhury, Prosenjit
CHAPTER 2.
Kendall, Don L., The Univ. of New Mexico , Shoultz, Robert A., The Univ. of New Mexico
CHAPTER 3.
CHAPTER 4.
Stewart, Diane K., FEI Co. , Casey, J. David
CHAPTER 5.
Romankiw, Lubomyr T., IBM Thomas J. Watson Research Ctr. , O'Sullivan, Eugene, IBM Thomas J. Watson Research Ctr.
CHAPTER 6.
Friedrich, Craig R., Michigan Technological Univ. , Warrington, Robert O'Neil, Michigan Technological Univ. , Bacher, Walter, Karlsruher Institut für Technologie , Bauer, Werner, Karlsruher Institut für Technologie , Coane, Philip, Louisiana Tech Univ. , Göttert, Jost , Hanemann, Thomas, Karlsruher Institut für Technologie , Hausselt, Juergen H., Karlsruher Institut für Technologie , Heckele, Mathias P., Karlsruher Institut für Technologie , Knitter, Regina , Mohr, Jürgen, Karlsruher Institut für Technologie , Piotter, Volker, Karlsruher Institut für Technologie , Ruprecht, Robert, Karlsruher Institut für Technologie
CHAPTER 7.
Jerman, Hal, Coherent, Inc. , Terry, Stephen C.
CHAPTER 8.
CHAPTER 9.
CHAPTER 10.
Luo, Fang-Chen F., AU Optronics Corp.
CHAPTER 11.
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