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Abstract
Heterogeneous integration can refer to the combination of many types of devices. Silicon, GaAs, or SiGe electronics, micro-electro-mechanical devices, optics, optoelectronic devices, and packaging can be combined. This chapter will focus on the construction and use of devices incorporating very-large-scale integration with a particular emphasis on the integration of silicon electronics and optoelectronic devices.
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CHAPTER 5
44 PAGES


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