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Process Integration
Book: Introduction to Semiconductor Manufacturing Technology, Second Edition
Author(s): Hong Xiao
Published: 2012
https://doi.org/10.1117/3.924283.ch13
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Abstract
IC manufacturing involves many processing steps that have been described in the previous chapters. To fabricate a functional chip, every processing step must be well integrated with the other processing steps. This chapter describes the integration of these steps in CMOS IC chip fabrication.
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CHAPTER 13
 32 PAGES
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KEYWORDS
Integration
Manufacturing
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