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Chapter 10:
Chemical Vapor Deposition and Dielectric Thin Films
Book: Introduction to Semiconductor Manufacturing Technology, Second Edition
Author(s): Hong Xiao
Published: 2012
https://doi.org/10.1117/3.924283.ch10
Abstract
In the semiconductor industry, electrically insulating materials are commonly called dielectrics. Dielectric thin-film processes are adding processes because they add a thin layer of dielectric materials to the wafer surface. While the majority of dielectric thin-film processing is CVD processing, spin-on dielectric processes are also used in IC manufacturing. The main issues with dielectric thin-film processes are filling gaps without voids, deposition of uniform film with high throughput, and making the final surface as planarized as possible.
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CHAPTER 10
 82 PAGES
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