Access to SPIE eBooks is limited to subscribing institutions. Access is not available as part of an individual subscription. However, books can be purchased on SPIE.Org
Abstract
IC manufacturing involves many processing steps that have been described in the previous chapters. To fabricate a functional chip, every processing step must be well integrated with the other processing steps. This chapter describes the integration of these steps in CMOS IC chip fabrication.
Online access to SPIE eBooks is limited to subscribing institutions.
CHAPTER 13
32 PAGES


SHARE
Back to Top