Access to eBooks is limited to institutions that have purchased
or currently subscribe to the SPIE eBooks program. eBooks are not
available via an individual subscription. SPIE books (print and
digital) may be purchased individually on
Contact your librarian to recommend SPIE eBooks for your organization.
IC manufacturing involves many processing steps that have been described in
the previous chapters. To fabricate a functional chip, every processing step must
be well integrated with the other processing steps. This chapter describes the
integration of these steps in CMOS IC chip fabrication.
Online access to SPIE eBooks is limited to subscribing institutions.